The Preparation and Surface Morphology Analysis of ZnO/TiO2 Composite Thin Films

Ji Cui


In this paper, the ion source electron beam evaporation method was used to fabricate ZnO films with Si as the base and TiO2 as the buffer layer. By further thermal insulation and annealing treatment at different temperature conditions, different film samples were prepared for the surface morphology analysis and light scattering properties study. The experimental results show that: Annealing temperature has significant influence on the sample surface roughness, grain size, fractal dimension and other parameters, and the surface morphology analysis is helpful to understand the grain growth mechanisms of film as well as the improvement of film preparation process.

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